MEMS Pressure Sensor

MEMS (Micro Electromechanical System, namely micro-electromechanical systems) is the set of micro-sensors, actuators and signal processing and control circuits, interface circuits, communication and power in one micro-electromechanical systems.

To sum up, MEMS has the following basic features: miniaturization, intelligent, multi-functional, highly integrated and suitable for mass production.

MEMS pressure sensor, is the proliferation of silicon oil-filled core and micro-processing circuit to enlarge the composition of the measured pressure causing distortion in the core body of the bottom of the diaphragm, through micro-amplification processing circuit, the pressure into a standard signal output (4-20mA, 1-5V, etc.).

Measuring range and the output mode of MEMS pressure sensor can be customized according to requirements of customer.